Air-bridged Schottky diodes for dynamically tunable millimeter-wave metamaterial phase shifters
نویسندگان
چکیده
منابع مشابه
Distributed MEMS Tunable Phase Shifters on CMOS Technology for Millimeter Wave Frequencies
The concept of a slow-wave MEMS tunable phase shifter that can be fabricated using the CMOS back-end and an additional maskless post-process etch is presented. The tunable phase shifter concept is formed by a conventional slow-wave transmission line. The metallic ribbons that form the patterned floating shield of this type of structure are released to allow motion when a control voltage is appl...
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Millimeter-wave phase shifters are important components for a wide scope of applications. An analog-type phase shifter for W-band has been designed, analyzed, fabricated, and measured. The phase shifter consists of a reconfigurable highimpedance surface (HIS) controlled by micro-electromechanical system (MEMS) varactors and placed adjacent to a silicon dielectric rod waveguide. The analog-type ...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2021
ISSN: 2045-2322
DOI: 10.1038/s41598-021-85565-z